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The Gas Field Ion Source (GFIS) technology uses a scanned beam of inert gas ions such as helium, rather than electrons typically used in scanning electron microscopes (SEM), to generate Seite 2 and pattern ultra-high resolution images and nanostructures. The beam is produced by an atomically sharp tip and results in a probe with incredibly high brightness (>5X109 A/cm2-sr at 30KeV) and extremely low energy spread (<1eV) which can be focused into an extraordinarily small spot (<0.35nm). The unique interaction dynamics of the helium ion beam with the sample enables applications in diverse fields of nanotechnology, materials and biological sciences, and nanofabrication.
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