3-D Electron Beam

3-D Electron Roughness Analyzing Microscope

The new 3D e-RAM is a scanning electron microscope specifically developed for surface roughness analysis and topographic reconstruction. 3-D roughness measurements are obtained using signals from a 4-channel SE detection system that enables quantitative surface roughness measurements to a vertical resolution specification of 1 nm. The major benefit of this system is that it can produce AFM quality data, precisely where you need it, with a wider lateral and vertical measurement range. The Thermal Field Emission (TFE) source offers high performance, even at low acceleration voltages.

For more infomation please visit the STS Elionix web site at http://www.sts-elionix.com/.