3-D Electron Beam

3-D Electron Roughness Analyzing Microscope

The new 3D e-RAM is a scanning electron microscope specifically developed for surface roughness analysis and topographic reconstruction. 3-D roughness measurements are obtained using signals from a 4-channel SE detection system that enables quantitative surface roughness measurements to a vertical resolution specification of 1 nm. The system can produce AFM quality data, precisely where you need it, with a wider lateral and vertical measurement range.
Contact STS Elionix .

The MeX software package turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images, the software automatically retrieves 3D information which is used to perform traceable metrology examination. Contact EBSciences.