The new 3D e-RAM is a scanning
electron microscope specifically developed for surface roughness analysis and topographic reconstruction. 3-D roughness measurements are obtained using signals from a 4-channel SE detection system
that enables quantitative surface roughness measurements to a vertical resolution specification of 1 nm. The major benefit of this system is that it can produce AFM quality data, precisely where you
need it, with a wider lateral and vertical measurement range. The Thermal Field Emission (TFE) source offers high performance, even at low acceleration voltages.
For more infomation please visit the STS Elionix web
site at http://www.sts-elionix.com/.
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